Life Cycle Assessment of semiconductor manufacturing: Development of custom database for chemicals

Main Presenter:    Isabelle Servin;Joao-Carlos Lopes-Barbosa;Laura Vauche;Léa Di Cioccio 


To limit global warming by 1.5°C target in the Paris Agreement, emissions need to be reduced by 45% by 2030 and reach net-zero by 2050. The semiconductor industry commits to a decarbonization plan by reducing greenhouse gases, preserving energy, water and other resources.
From the Life Cycle Assessment (LCA) perspective, we quantify the environmental impacts of the fabrication of integrated circuits (IC) for 200 & 300 mm Silicon wafer manufacturing in clean rooms [1, 2, 3]. We translate the Life Cycle Inventory (LCI) results into 16 impacts factors, using the EF3.1 methodology recommended by the European Commission [3]. The cradle-to-gate LCA allows identifying the most contributing process steps. This study focus on environmental impact of chemicals steps (wet cleaning, lithography [3] …). We combine characterization of basic chemicals using Ecoinvent v3.9 database and modeling for complex chemistries based on literature or proxy method [4]. In addition, top-down approach is applied for the wastewater treatment. Some modeling examples will be detailed. Eco-design paths will be put forward to reduce the environmental footprint.

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